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Dear Dung-An,

Another good option for MEMS manufacturing is Integrated Sensing Systems
(ISSYS).  ISSYS is a commercial MEMS company that provides contract
manufacturing and MEMS process steps.  In fact, ISSYS has helped
customers ranging from single individuals trying to get grants to
fortune 500 companies.  Among other processes, ISSYS provides:

   *      Anodic Bonding
   *      Deep RIE (STS)
   *      Dicing
   *      EDP etching
   *      Photolithography
   *      Sputtering
   *      Metrology Services (SEM, WYKO)
   *      Misc fabrication processes.

You can find out more about ISSYS and the MEMS services that they
provide at www.mems-issys.com or by
calling Ms. Sonbol Ansari at (734) 547 - 9896 ext. 104.

Best of Luck,

Randy Grimes

At 12:41 PM 4/28/99 -0400, Dung-An Wang wrote:
>Hi
>Are there other MEMS manufacturers besides MCNC MUMPs?
>Your help is really valuable to me.
>Thanks a lot.
>
>   Sincerely,
>          Dung-An
>
>Phone:
> Office: (734) 615-0303   Home  : (734) 662-1553
>Address:
> Office:                               Home:
>  University of Michigan                  411 Longshore Dr.
>  Department of Mechanical Engineering    Ann Arbor, MI 48105
>  3007 EECS, 2350 Hayward                 U.S.A.
>  Ann Arbor, MI 48109-2125
>  U.S.A.
>E-Mail:
>   [email protected]
>Homepage:
>   http://www-personal.engin.umich.edu/~wangd

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Dear Dung-An,
Another good option for MEMS manufacturing is Integrated Sensing Systems
(ISSYS).  ISSYS is a commercial MEMS company that provides contract
manufacturing and MEMS process steps.  In fact, ISSYS has helped customers
ranging from single individuals trying to get grants to fortune 500
companies. 
Among other processes, ISSYS provides:


     Anodic Bonding


     Deep RIE (STS)


     Dicing


     EDP etching


     Photolithography


     Sputtering


     Metrology Services (SEM, WYKO)


     Misc fabrication processes.

You can find out more about ISSYS and the MEMS services that they provide
at www.mems-issys.com or by

calling Ms. Sonbol Ansari at (734) 547 - 9896 ext. 104.
Best of Luck,
Randy Grimes
At 12:41 PM 4/28/99 -0400, Dung-An Wang wrote:

>Hi

>Are there other MEMS manufacturers besides MCNC MUMPs?

>Your help is really valuable to me.

>Thanks a lot.

>

>   Sincerely,

>          Dung-An

>

>Phone:

> Office: (734) 615-0303   Home  : (734) 662-1553

>Address:

> Office:           &
nbsp;            &nb
sp;     
Home:

>  University of Michigan       &nbs
p;         
411 Longshore Dr.

>  Department of Mechanical Engineering    Ann
Arbor, MI 48105

>  3007 EECS, 2350 Hayward       &nb
sp;        
U.S.A.

>  Ann Arbor, MI 48109-2125

>  U.S.A.

>E-Mail:

>   [email protected]

>Homepage:

>  
http://www-personal.engin.umich.edu/~wangd

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