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MEMSnet Home: MEMS-Talk: Is gold CMOS compatible?
Is gold CMOS compatible?
2000-02-19
Ramakrishna M V S
Is gold CMOS compatible?
Ramakrishna M V S
2000-02-19
Hi.

I would like to know if Gold is CMOS compatible (actually i heard that it is
not and am looking for reasons). If it indeed is not CMOS compatible then
why do many use gold as a reflective coating in micromachined optical
switches?

Similarly, i would like to know how serious it is to use NaOH and KOH in
CMOS clean rooms.

Please e-mail me at [email protected]

Regards
Rama


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