>Does anybody have experience with, or know of work on the
>fabrication of silicon dioxide membranes/diaphragms in silicon
>wafers ? Is this possible with thermally grown oxide 1 micron thick,
>if the membranes are sufficiently small?
>Thank you, Tony Rogers
>
>Applied Microengineering Ltd
>68 Milton Park, Abingdon, OXON, OX14 4RX, UK.
>Tel: +44 (0) 1235 833 934
>Fax: +44 (0) 1235 833 935
>WWW: http://www.aml.co.uk
>e mail: [email protected]
>
It has been my experience that you can easily form small membranes from thermal
SiO2. However, they tend to deform from stress and wrinkle.