i use Ta2O5 as hydrogen conductor.
Ta2O5 is reactive dc sputtered.
i change the expermental parameters such as gas pressure and power.
but when i sputtered Pt on Ta2O5, Ta2O5 acts as like resistor not insulator.
i also tried 2 um thick Ta2O5 to enhance its density.
but it doesn't work.
thanks for reading it.
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