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MEMSnet Home: MEMS-Talk: Re: Silicon dioxide membranes
Re: Silicon dioxide membranes
1996-03-27
Mac McReynolds
1996-03-27
Hal Jerman
Re: Silicon dioxide membranes
Hal Jerman
1996-03-27
The earliest reference I know about is:

Buckling of Thermally-Grown SiO2 Thin Films, C.W. Wilmsen, E.G. Thompson, and
G.H. Meisner, IEEE Trans. Elec. Dev., Jan 1972, p. 122.

Yes, they do work if they are small enough.

Signed:  Hal Jerman, Ph.D., EG&G IC Sensors    phone: 408-955-1211
         Director of Technology                fax:   408-434-6687
         1701 McCarthy Blvd, Milpitas, CA 95035


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