Hi there,
I'm working on the design and fabrication of a bulk micromachined
resonator and I would like to know if
there is any special equipmentto perform KOH etches using
electrochemical etch stop, specially wafer holders which leave one side
open to the etchant while the other is protected and contacted in both
the p and n zones.
We have built from scratch our own Teflon holder but is quite
time&effort expensive to put and take out the wafers again and again.
Anyway any information about electrochemical KOH etch stop will be
really wellcomed.

Thanks in advance for any comments.
Regards

Jorge Amírola-Sanz    ([email protected])

Asst. Researcher.
Universidad Politécnica de Catalunya (SPAIN)
Dept. Ingeniería Electrónica.