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MEMSnet Home: MEMS-Talk: Re: Vacuum/Sputtering Info
Re: Vacuum/Sputtering Info
1996-03-27
Carlos Mastrangelo
Re: Vacuum/Sputtering Info
Carlos Mastrangelo
1996-03-27
Try Vossen's Thin film Processes, Vol I
O'Hanlon , A User's guide to vacuum technology

-CHM
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