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MEMSnet Home: MEMS-Talk: drill small holes on glass
drill small holes on glass
2000-03-14
Sun Kai
drill small holes on glass
Sun Kai
2000-03-14
Hello everybody,
      Do you have any method about drilling small holes on SiO2 glass? The
diameter of the hole is less then 1mm, and the depth is 500um, the same as
the thickness of glass. It will spend long time, if wet-etching is used,
maybe 1 month. I do not know if mechanical method is OK.
     Thanks a lot.

*************************************
Kai Sun( $BB9!!3. (J)
Dept. of EcoSystem Engineering,
Graduate School of Engineering,
The University of Tokushima,
2-1 Minamijyosanjima,
Tokushima 770-8506, Japan
Tel: 4378 (O)
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