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MEMSnet Home: MEMS-Talk: Removing PR after ion milling?
Removing PR after ion milling?
2000-03-14
Yahong Yao
Removing PR after ion milling?
Yahong Yao
2000-03-14
Hi, All,

I have metal layer (Cr 300A, Au 1200A), the patterns are 1um features with
1um spaces. I use ion mill to etch the metal with PR (897-12i) as the mask.
After the etching, it is hard to clean the PR ( I use hot 1165 remover).
There are residual attached on the pattern edge.
Any suggestion is highly appreciated. Thanks in advance.

Yahong
-----------------------
Yahong Yao
NYS Center for Advanced
Thin Film Technology
CESTM, Room L245
251 Fuller Road
Albany, NY 12203
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