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MEMSnet Home: MEMS-Talk: Negative PR fo DRIE
Negative PR fo DRIE
2000-03-23
Cheng-Chieh Hsieh
Negative PR fo DRIE
Cheng-Chieh Hsieh
2000-03-23
Dear all,

        Is there any negative photoresist for DRIE other than SU-8
available?
I will appreciate for providing detailed information.  Thanks a lot in
advance.

Cheng-Chieh Hsieh


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