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MEMSnet Home: MEMS-Talk: Re: Releasable wafer to wafer bonding
Re: Releasable wafer to wafer bonding
2000-04-03
CLIF HAMEL
Re: Releasable wafer to wafer bonding
CLIF HAMEL
2000-04-03
Have you tried using the wax typically used to hold a GAs wafers and sapphire
substrates?

Clif

>>> Francesco Ratti  03/28 2:06 AM >>>
Hi,

I need to find a releasable wafer to wafer bonding in order to ship
microstructures.
What are the methods available.
It seems that PB-Sn could be a good method but is difficult to deposit
on the wafer. Is there some more easy material?

thanks


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