For a quick response, here are some numbers that would get you going..
Density = 2330 Kg/m^3
Specific heat = 753 J/Kg C
Thermal conductivity = 125 W/m K
CTE = 9.4 x 10^-6 /C
heat capacity = density*specifc heat

For detailed information, you can look up the mems property data base
at isi.edu

Regards,
Ram
-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=
  Ram N. Ramanan, Ph.D., PE, Member of Technical Staff
       FSI International, MS 5-7060, 600 Millennium Dr., Allen, TX-75013
             Email: [email protected],  ?FSI: http://www.fsi-intl.com
                    Phone: 972-643-2213, Fax: 972-643-2292
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                    "Liu Yanju
                    (Dr)"                To:     [email protected]
                                   Subject:     Thermophysical properties
of polysilicon

                    03/29/2000
                    19:05
                    Please
                    respond to
                    "Liu Yanju
                    (Dr)"; Please
                    respond to
                    mems-cc





To MEMS colleagues:

Can anyone provide me with information about thermophysical properties of
polysilicon such as thermal conductivity, specific heat and heat capicity


Thank you very much.

Liu Yanju, Ph. D
Micro Machine Lab
School of MPE
Nanyang Technological University
Singapore