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MEMSnet Home: MEMS-Talk: photoresist for KOH etching
photoresist for KOH etching
2000-04-03
Nickolay Lavrik
2000-04-11
Nickolay Lavrik
photoresist for KOH etching
Nickolay Lavrik
2000-04-03
Any information on photoresists that reliably protect Si during deep KOH
etching will be highly appreciated.


--
Nickolay Lavrik

University of Tennessee
Department of Chemistry
420 Buehler Hall

Ph.(865) 974-6174


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