Hello Everybody,

I have been very unsuccesful in finding extensive information on the Web,
in published work (barring Analytical Chemistry) and in MEMS Sourcebooks
on some clear cut recipes for fabricating microchannels on glass. Most of
the masking seems to be Cr/Au, LPCVD or Amorphous Si.

Here is my specific question.

I need 500 um deep isotropically etched channels with a semicircular
profile on Pyrex 7740. A HF HNO3 based recipe (Fan/Harrison, Analytical
Chem, v 66, n 1 , pp 177) would take atleast 16 hours to etch as deep and
would obviously call or a very thick Masking film. Is there a way I could
do it without making it the process too painful. I'm not aware if laser
micromachining is a viable option.

I'd appreciate any help, direct or reference based. Thanks is advance.

Ninad

PS: Corning, Laser fab people, microfluidics/biochip community - could we
have some more info on glass processing techniques in publications.
Thanks.
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                             Christos! Ergo sum.
nInad sHiNde
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pH @ 765-495-7092 (hoMe)                           @ 765-494-8610 (offIce)
URL:http://widget.ecn.purdue.edu/~shinden
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