Dear Karim,

for more than five years, AMMT GmbH develops specialized equipment for
silicon micromachining using the electrochemical etch-stop:

- MEMS Potentiostat and Multi-Channel Potentiostat
  The potentiostat provides unique features such as peak detection to
  alert you when the process is finished or error handling (broken
  cable, etchant leakage or short circuits). It is small,
  easy to use and can be controlled by our Windows-based software.
  The multi-channel version allows to control up to 16 potentiostats
  with one PC.

- Vacuum wafer-holders
  We offer a range of screw-less holders for 4"- and 6"-wafers with
  backside protection and optional integrated working and reference
  electrodes. Rapid and safe assembly is ensured by a vacuum sealing
  mechanism.
  Our potentiostat's peak and error detection features control the
  wafer rinsing procedures of an industrial automatic wet bench, which
  is already successfully in operation.

To find out more, check our web site http://www.ammt.de

Best regards,

Jan

--------------------------------

Dipl.-Ing. Jan Lichtenberg

AMMT Advanced Micromachining Tools GmbH
A.-Feuerbach-Str. 6
D-67227 Frankenthal
Deutschland/Germany

Tel.: +49-6233-496001-4
Fax:  +49-6233-4362-14

eMail: mailto:[email protected]
WWW:   http://www.ammt.de