Hi all,


I want to thank everyone who has responded to my mail asking for

suppliers.  A summary of all these suggestions I got is given below.


Karl Kuehl0100,0100,0100Tim=
es New Roman


( incomplete ! ) List  of  LPCVD nitride  suppliers  :


1)  From:                Jaime Poris <

 Subject:               Re: LPCVD-nitride supplier needed

...try polishing corporation of america (PCA) in santa clara, california

Jaime


2)  From:               Justin Mansell <

       Try UHV in San Jose, CA   408 298 9255

Justin Mansell          |

Ginzton Laboratory      |

445 Via Palou St.       |

Stanford, CA 94305      |       (650) 723-2666 (fax)    (650) 725-2284
(office)


3)  From:               Cyndi Zuniga <

     We are Silicon Valley Microelectronics, Inc located i San Jose,
California, and we have been providing silicon

wafers to your insititute in the past.We can also assist you with this
service.

Cyndi Zuniga
European Sales Manager
Silicon Valley Microelectronics, Inc.
Telephone: 408-437-8505
Fax: 408-436-8402
"http://www.svmi.com/" eudora=3D"autourl"www.svmi.com


4)  From:               "Levy, Roland" <

     We have capabilities for processing 4"-6" wafers here and can help   =


     you with LPCVD of Si3N4 and other processes....

Roland Levy

Phone (973) 596-3561

Fax: (973) 596-8369


outFrom :  "Jon Bernstein"  { HYPERLINK "mailto=
:[email protected]" }0000,0000,FF00jb=
[email protected]0100,0100,0100

leftAsk  CVD Systems, Inc.  in the US  619-792-=
1690


6) From:        "[email protected]"
<

     Organization:      Twente MicroProducts

We deposit low stress LPCVD in custom thicknesses. More information
about TMP is found at: http:/www.microproducts.nl

    Vincent Spiering

     Dr. Ir. V. Spiering,  vice president marketing

    TMP B.V.

    P.O. Box 318

    7500 AH Enschede

    The Netherlands

    phone: +31 53 4800111, fax: +31 53 4800119

        { HYPERLINK http://www.microproducts.nl }=
0000,0000,FF00http://www.microproducts.nl0100,0100,0100


7)  From:               [email protected]

     I am commercial projects manager of the microsystems and

microengineering group at DERA in Malvern in the U.K.

We deposit LPCVD and PECVD (low stress) nitrides on 4 inch

wafers as standard in our silicon processing laboratory including the

development of low stress material.

Dr Roger Carline


8)  From:               Sylvain Jeanneret <

      We make LPCVD nitride deposition on silicon wafers, but on 4"
wafers only, ...

Sylvain Jeanneret                              Phone: +41 32 7205 121

Institute of Microtechnology                   Direct:+41 32 7205 850

University of Neuchatel                        Fax:   +41 32 7205 711

Rue Jaquet-Droz 1        E-mail:mailto:[email protected]

2007 Neuchatel                  Internet:  HTTP://www-samlab.unine.ch

Switzerland


9)   From:              [email protected]

   ...What stress level of nitride are you looking for and what are the

quantities/intervals? We supply low-stress nitride (around 250-400 MPa),

mainly on our own supply of 4"Si wafers, but can discuss layers on

preprocessed wafers in some cases.

Stein Ivar Hansen

Dr. Stein Ivar Hansen                   +47 33 03 51 95 ( Direct )

Vice President Foundry Services         +47 33 03 50 00

                                                        +47 913 921 36  (Mobile)

SensoNor asa

P.O Box 196                             +47 33 03 51 05 ( Fax )

N-3192 Horten

NORWAY                   e-mail: [email protected]

http://www.sensonor.com


10)  From:              [email protected]

     ...wir k=F6nnten Ihnen einen solchen Prozess-Service anbieten, jedoch=

zurZeit lediglich auf 100 mm Wafern (150 mm Wafer ab Ende 2000).
Wenn Sie Standard-Nitrid (Stress ca. 1 GPa) w=FCnschen, so liegt das
Limit in der Dicke bei 150 nm. Ein spezielles "low-stress" Nitrid (ca.
300 MPa) ist jedoch in gr=F6sseren Dicken bis 500 nm verf=FCgbar.

 (Tel. 0421-2208 276 oder 0173 214 9805)

J=F6rn Koblitz

microFAB Bremen GmbH

www.microfab.de (see for service details)


11) From:      FhG-ISiT     Itzehoe

                       [email protected]  /  [email protected]



Fraunhofer-Institute for
Microelectronic Circuits and Systems
IMS Muenchen

Hansastrasse 27 d
D-80686 Muenchen Germany

Phone :   +49 89 54759 237
Fax :     +49 89 54759 100
email :   [email protected]
Web:      http://www.ift.fhg.de