Hi everybody,
does a wet chemical etching for the planarization or polishing of {100}
planes of silicon wafers with small etching rate exist? I have got the
problem that after an anisotropic RIE step the resulting vertical {100}
flanks are too rough. If such an etch exist, please let
me know what it is and how to use it.
Any advice would be very helpful.
Best regards

Joachim Knoch