To group
I was asked to look into the possible RIE etching of YAG ( Yttrium Aluminum
Garnet). I wish to use RIE to etch a circular or square mesh pattern either
3 um in diameter or 3um on a side in the case of a square mesh. The etch
depth in the YAG should be 3um. Any suggestions, leads, or ideas would be
appreicated.
--
Keith Jackson
Lawrence Berkeley National Laboratory
Berkeley,Ca 94720
510-486-6894 voice
510-486-4955 fax