>
> Hello again. I am looking for suppliers of pattern generators/laser
>photoplotters for making masks. The specifications we are looking for
>are:
>1) 5" x 5" masks
>2) Near 1 um minimum feature size
>3) This being a University, a 'reasonable price' (i.e not millions of
>dollars)
>
>  What I have found so far (and have quotes from) are:
>Highborn Technology: Rebuilt pattern generators
>NEOS Technologies: Laser Photoplotters
>
>Both of these sell machines that do what we want to do at a reasonable
>price.
>(If you want info on these companies, please contact me)
>
>  I am looking for other companies who make or rebuild similar machines.
>I have heard 'rumours' that there are a number of companies making laser
>photoplotters for use in PCBs and can be used for wafers. However, I can
>only find hints of these companies on the web or in buyers guides.
>
> Anyone know any others out there ?
>
>    Ken Westra
>    Director, MicroFab
>    University of Alberta
>     [email protected]
>


Heidelberg Instruments (www.himt.de) offers a laser lithography system
DWL66 which meets your requirements.

Marc Schneider
University of Duisburg
Department of Optoelectronics
Germany