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MEMSnet Home: MEMS-Talk: HF etching quartz mask plates
HF etching quartz mask plates
2000-06-24
Gary Dale
HF etching quartz mask plates
Gary Dale
2000-06-24
Can anyone tell me how fast a fused quartz mask plate will be etched in 4:1
buffered HF?

I know quartz can be dry etched, but I don't want depth (<300nm), or steep
sidewalls.

Gary Dale


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