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MEMSnet Home: MEMS-Talk: Help on Technics PE II-A etcher
Help on Technics PE II-A etcher
2000-07-07
HeeJun Jeong
Help on Technics PE II-A etcher
HeeJun Jeong
2000-07-07
Hi, I'm looking for somebody can give some help.
We have Technics PE II-A plasma etcher. We got this from somewhere without any
document about that. It's not working now. We tested the machine and found the
problem is around rf amplification section. Can I get a copy the schematic of
that section from somebody?

Thanks.

email:[email protected]


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