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MEMSnet Home: MEMS-Talk: Pt electrode failure after thermal bonding. . . help?
Pt electrode failure after thermal bonding. . . help?
2000-01-05
Drew Manica
Pt electrode failure after thermal bonding. . . help?
Drew Manica
2000-01-05
I am E-gun depositing Pt electrodes (500A) onto a Ti adhesion layer (200A)
on borosilicate glass, and then thermally bonding this plate to another
(slightly smaller) borosilicate plate, making an electrode sandwich.  After
bonding at 650C for 4h, the electrodes seem to change to a highly
resistive, cloudy grey-white wherever the top plate covers them, but they
remain highly mirrored and cunductive where they are not covered by the
bonded top plate.  Can anyone explain this phenomenon to me?

Additionally, the worse the electrode damage, the worse the bonding.  I
have a couple ideas, but I don't want to influence anyone else's thoughts.
Any help on bonding with metal between would help.  Thanks!


Drew Manica
Penn State University
Chemistry Department
(814) 863-8063

http://neuron.chem.psu.edu/


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