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MEMSnet Home: MEMS-Talk: koh etching
koh etching
2000-07-25
K.Elbattay
koh etching
K.Elbattay
2000-07-25
hallo,
my question is: what is the etching rate of KOH in silicon nitride? I know
that this rate is almost zero but what if the reaction KOH_Si3N4
take 10 hours (for example), i think that in this case the etching rate of
KOH can play an inpomrtant role; or not?

thank you very much for your future response.


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