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MEMSnet Home: MEMS-Talk: Etch system for polyimide release
Etch system for polyimide release
2000-07-27
Patrick Franklin
Etch system for polyimide release
Patrick Franklin
2000-07-27
        I am in the market for a downstream plasma system to perform a MEMs
release
        on a 50 uM by 50 uM square structure. It will be resting on a 2.5 uM bed
of
        polyimide. Any recommendations as to what equipment to consider. I
prefer
        to acquire a unit on the secondary market. The footprint may also be a
consideration.
        Anyone have any experience with a YES CV100PZ system?

        TIA

        Pat Franklin
        Indigo Systems


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