Long-term stability and fatigue of MEMS capacitive pressure
Lavan Wilson
2000-07-30
sensors
Hello
I am looking for information on the long-term stability
and the possible fatigue of MEMS capacitive pressure
sensor or pressure transducers.
I would be grateful to get any information in this subject.
Please reply to:
[email protected]
Thanks in advance for your help
Lavan Wilson
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