A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: all-dry lithographic process
all-dry lithographic process
2000-01-06
Murat GEL
all-dry lithographic process
Murat GEL
2000-01-06
Is there anyone who knows about all-dry lithographic process?
ex: DESIRE process (Dry etching of Silylated Image Resist)
or SAHR process (silylated acid hardened resist)

I am trying to buy that kind of a resist. Anyone doing similiar dry
lithography ? Any piece of information would be very appreciated.
Thankyou.
Murat GEL


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
Harrick Plasma, Inc.
The Branford Group
MEMS Technology Review