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MEMSnet Home: MEMS-Talk: Photoresist deposit on KOH holes
Photoresist deposit on KOH holes
2000-08-04
SILLON Nicolas
Photoresist deposit on KOH holes
SILLON Nicolas
2000-08-04
Hi,

I need to deposit photoresist on a wafer with KOH holes. With standard
methods I am not able to cover correctly the edges of the holes.
Does anybody can help me?

Thanks.

Nicolas.


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