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MEMSnet Home: MEMS-Talk: Cool grease vendor
Cool grease vendor
2000-08-15
[email protected]
Cool grease vendor
[email protected]
2000-08-15
Hello,

I am trying to get a hold of something called "cool grease" It can be used for
attaching backing wafers during deep RIE etching. I have been told that it works
better than photoresist because it has greater thermal conductivity.

Does anyone know of a vendor for this product?

Thanks,
Shivalik


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