Dear MEMS-colleagues,

I'm locking for any informations about the temperature behavior of the
e-modulas and the piezo coefficient in a temperature range below -25°C.

We've an inceasing sensitivity at a micromechanical pressure sensor and
now we are searching for an explaination.

Roy Knechtel


X-Fab Gesellschaft zur Fertigung von Wafern
Haarbergstraße 61
D-99097 ERFURT