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Hello,

Does anyone know of any structural or chemical problems, etc
with using dichlorosilane or silicon tetrachloride instead of silane to make
polysilicon?
I am concerned with chlorine
incorporation, but suspect it will be driven off at low temperatures.

Thanks for any info you can supply!

Regards

Tel :(06)2757575-62681-268
Fax : (06)2344496
Add. : Department of chemical engineering
       National Cheng Kung University
       Tainan 70101, Taiwan