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MEMSnet Home: MEMS-Talk: Low-stress Si3N4 LPCVD
Low-stress Si3N4 LPCVD
2000-09-13
Mickey
Low-stress Si3N4 LPCVD
Mickey
2000-09-13
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Hi,

Does anyone know where to get low stress silicon
nitride wafer (less than 200MPa tensile)?
Thickness of nitride would be about 0.1 to 0.2 micron.

Thank you in advance,
Michael
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