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MEMSnet Home: MEMS-Talk: Protection of Backside during processing
Protection of Backside during processing
2000-09-14
Peter Goetz
Protection of Backside during processing
Peter Goetz
2000-09-14
Any good ways to protect the backside of a GaAs wafer during processing?
Any specific photoresists or metals that people have sucessfully used?

Thanks,

Peter Goetz
[email protected]


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