While considering different solutions for wafer cleaning, I came across
the CO2 snow blast method. Some vendors offer manual or completely
automatic wafer handling systems that clean wafers using the CO2 snow
blasting.
I would very much like to hear form anyone who have had some experience
with these methods.
Thanks in advance, Steen Weichel.
____________________________________________________
Packaging Engineer - Integrated Optics, Ph.D. Steen Weichel
ADC Denmark ApS | Ryttermarken 15-21 | 3520 Farum
Local phone: +45 4434 7070 | Mobile phone: +45 4051 0862
Fax: +45 4434 7001 | Web: http://www.ibsen.dk
E-mail: [email protected] | [email protected]
