If someone has a foundry source for the following metal
and dielectric depositions via CVD, our group would be very
interested in contracting their services: copper, ruthenium,
and tantalum pentoxide. I've tried several foundries that
involve themselves with sputter depositions, CVD, oxidations,
anneals, etc. but no luck on the above materials. Please
respond only if the source is likely to have capability to do
the above materials, as I don't want to cause the group to
be flooded with listings of standard-processing foundries.
CVD is being targeted as these materials need to cover a
through-hole application.

Thanks in advance for any suggestions!


John M. Koons
Process Engineer
Innovative Micro Technology
805-681-2816
[email protected]