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MEMSnet Home: MEMS-Talk: Metal electrodes onto thick SU-8 resist
Metal electrodes onto thick SU-8 resist
2000-10-23
Dekker, R. (Ronald JDSU)
2000-11-15
Swomitra Mohanty
Metal electrodes onto thick SU-8 resist
Dekker, R. (Ronald JDSU)
2000-10-23
Hi there MEMS people,

Is there anybody who has some experience on evaporating or sputtering
metals onto SU-8 resist? Is there any data on adhesion of metals on this
resist
type? Which metals show good adhesion and which adhere badly?

Any info would be greatly appreciated,

Cheers,
Ronald Dekker   <<< [email protected]
  >>>


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