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MEMSnet Home: MEMS-Talk: how to do alignment before wafer bonding
how to do alignment before wafer bonding
2000-10-23
li shifeng
how to do alignment before wafer bonding
li shifeng
2000-10-23
hi,guys
Now I want to do si-si and si-glass wafer bonding.I donot know how to do
alignment.someone told me i need etch alignment key on the wafer.someone
told me to do alignment manually....I am not sure.some experienced people
can tell me what is exact to do alignment before bonding....

Thanks
Dlee
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