Hello community

I am looking for a manual loaded plasma etcher to do photoresist stripping
as well as polyimide anisotropic etching. Best solution seems to be a system
with paralell plates configuration. Barrel type asher / stripper is not
adapted as it does not allow to do anisotropic etching and I don't want a
RIE system because of the high energy ions generated.
---> does anybody know what kind of equipment could match my need well (
name / model ) ? Could you let me know  any information about your
experience in plasma etching...

will appreciate your replies..                  Sebastien


CORTIAL sebastien
ATMEL-Grenoble / NIR
E-Mail : [email protected]
Ph.: (33) 4 76 58 32 64
Fax : (33) 4 76 58 31 05
CORTIAL sebastien
ATMEL-Grenoble / NIR
E-Mail : [email protected]
Ph.: (33) 4 76 58 32 64
Fax : (33) 4 76 58 31 05