A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Etching GaP and GaAsP
Etching GaP and GaAsP
2000-11-09
DirkPüttjer
Etching GaP and GaAsP
DirkPüttjer
2000-11-09
Dear MEMS community,

where can we find out a chemical composition for wet etching GaP and GaAsP
with high P-content ?
In order to etch 8 to 25 µm we need a composition with a high etching rate.

Thank you in advance for your answer.

D. Puettjer


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Tanner EDA by Mentor Graphics
The Branford Group
Nano-Master, Inc.