Trying changing your developer recipe.  One I use is 40 ml of 400k and 100
ml of water.    For about 20 microns thick it takes 2 minutes to develop.
I'm exposing on a karl suss aligner with 8 mw/cm^2 bulb for 27 seconds.  I
get good results with this recipe.  Hope this helps

Swomitra Mohanty

School of Electrical and Computer Engineering
Georgia Institute of Technology
MiRC-Joseph Pettit Bldg
791 Atlantic Dr
Atlanta, GA 30332


e-mail: [email protected]