Hi, friends
Now i will do boron diffusion.According to constant source diffusion
caculation, the time is nearly ten days to get 10um thickness concentration
5*10(19)memebrane.with two step diffusion calcualtion, the time is hugh.
someone told me hydrogen can enhance boron diffusion rate, even can diffuse
the whole wafer very fast. If you are expert about this hydrogen enhanced
boron diffsion, please give me some suggestions.If you have some references,
please send me.I will appreciate your any help.

Best
shifeng
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