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MEMSnet Home: MEMS-Talk: stress in Si substrate
stress in Si substrate
2000-12-07
cgorecki
stress in Si substrate
cgorecki
2000-12-07
Hello,

I'm looking for an apparatus for measuring of stress in Si substrates
(evaluation of curvature radius of wafer ?). Does anybody know where I can
find that (no expensive one)?

Thanks,
Christophe Gorecki



  *******************************************************************
Dr. Christophe Gorecki, CNRS Senior Researcher
Laboratoire d'Optique P.M. Duffieux, Faculte des Sciences et Techniques
16 route de Gray, 25030 Besancon, France
Tel: +33-3-81666607, fax: +33-3-81666423
e-mail: [email protected]


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