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MEMSnet Home: MEMS-Talk: Reactive Ion Beam Sputtering
Reactive Ion Beam Sputtering
2000-02-01
John Karpinsky
Reactive Ion Beam Sputtering
John Karpinsky
2000-02-01
I am in need of a processing service, and I have not been able to find
anyone who provides this service.  It is "reactive ion beam sputtering
of Silicon Nitride".  I need the silicon nitride deposited on an
unheated 100 mm diameter silicon substrate that has photoresist
patterned on it so I can do a nitride lift off process.  Can anyone
help?
--
John R. Karpinsky  ---  Chief Physicist
MEMS Optical, LLC., 205 Import Circle, Huntsville, AL 35806
Tel: 256-859-1886  Fax: 256-859-5890  Email: [email protected]


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