> I am etching a microfluidics channel into Corning 2947 soda lime glass
> using a 1:1 mixture of (BOE 6:1) : (BOE 10:1) from Baker.

I haven't worked with this kind of glass. My experince is only on #7740.
Annealing and etchant are two aproaches. You don't need NH4F in your
etchant, for you don't use photoresist. Using H+ to adjust the F-
concentration works well in #7740. (50%HF:69%HNO3:H2O at a volume rate of
2:1:2). About glass annealing, please also refer to

Fan, Z.H. and Harrison, D.J., 1994, Anal. Chem. 66:177-184.

Some of my glass wafers need this annealing process. But recent wafers don't
need this process.

Good luck,

            Dr. Zhen  YANG
            Surface & Interface Technology Division
            Department of Manufacturing Systems
            Mechanical Engineering Laboratory
            Namiki 1-2,  Tsukuba
            JAPAN  305-8564

            TEL: +81-298-61 7209
            FAX: +81-298-61 7167