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MEMSnet Home: MEMS-Talk: Finding an etchant
Finding an etchant
2001-02-27
Elizabeth Chalmers
Finding an etchant
Elizabeth Chalmers
2001-02-27
Hi, I am an engineering student at Boston University
and I'm interested in finding an etchant (wet or
reactive ion gas) that will attack a nickel film
selectively, but leave the photoresist relatively
unetched.  Do you have any ideas?  Thank you very much
for your time,

Elizabeth Chalmers


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