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MEMSnet Home: MEMS-Talk: questions regarding to RuO2 or IrO2
questions regarding to RuO2 or IrO2
2001-03-29
[email protected]
questions regarding to RuO2 or IrO2
[email protected]
2001-03-29
I am trying to use MOD (metal organic deposition) method to deposit RuO2 or
IrO2. What type of solvent and composition should be used? What is the
processing parameters?

Your help is very much appreciated!

Jessie Zhang


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