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MEMSnet Home: MEMS-Talk: RE: Protecting Coating for KOH etch
RE: Protecting Coating for KOH etch
2001-04-02
CAYER Félix
RE: Protecting Coating for KOH etch
CAYER Félix
2001-04-02
Si3N4 is a good protector for KOH etching. It has a very low etching rate in
that solution.

Félix Cayer
INO, Quebec


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