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MEMSnet Home: MEMS-Talk: Wafer boat for wet etching
Wafer boat for wet etching
2000-12-30
Chang-Hwan Choi
Wafer boat for wet etching
Chang-Hwan Choi
2000-12-30
I don't know how I should call what I want to get. But, I am looking for a
kind of boat (or cassette) to which I can load wafers. Especially, That
boat (or cassette) should be for wet etching since I want to put that boat
into a beaker which have etchants. In other words, for wet etching, I want
to put many wafers to a beaker at the same time. For that, I need some
loading boat which can hold several wafers without a corrosion by chemical
etchants.

Could someone let me know how I can get the stuff somewhere else? And how
should I call the stuff?

Thank you.

Chang.
Chang-Hwan Choi
Brown University
Division of Engineering, Box D
Providence, RI 02912, U.S.A.

Tel: (Home) 401-867-6017
        (Office) 401-863-2656
Fax: (Office) 401-863-9028
Email: [email protected]
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