I don't know how I should call what I want to get. But, I am looking for a
kind of boat (or cassette) to which I can load wafers. Especially, That
boat (or cassette) should be for wet etching since I want to put that boat
into a beaker which have etchants. In other words, for wet etching, I want
to put many wafers to a beaker at the same time. For that, I need some
loading boat which can hold several wafers without a corrosion by chemical
etchants.
Could someone let me know how I can get the stuff somewhere else? And how
should I call the stuff?
Thank you.
Chang.
Chang-Hwan Choi
Brown University
Division of Engineering, Box D
Providence, RI 02912, U.S.A.
Tel: (Home) 401-867-6017
(Office) 401-863-2656
Fax: (Office) 401-863-9028
Email: [email protected][email protected]