Dear MEMS colleagues,
for a project I will need approx. 200 double side polished 6" silicon
wafers with high resistivity (3000 ohm cm, HRS Wafer, SEMI
specifications for 6" wafers).
For single side polished 6" wafer I have already a supplier, but up to
now I had no luck in finding a supplier for double side polished
material. Does anyone know a supplier for these wafers?
Any suggestion is appreciated.
Thanks
Hans
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H.J. Quenzer
Fraunhofer Institut für Siliziumtechnologie
Fraunhoferstr. 1
D-25524 Itzehoe
Tel: +49 4821 17 4524
Fax: +49 4821 17 4590
e-mail: [email protected]
Internet: http://www.isit.fhg.de
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