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MEMSnet Home: MEMS-Talk: structural material properties of poly-silicon
structural material properties of poly-silicon
2001-04-17
Yong Hwa Park
structural material properties of poly-silicon
Yong Hwa Park
2001-04-17
Now I am modeling the RF beam resonator made by Poly-silicon.
I need the structural material properties of Poly-silicon (Elastic modulus,
Poisson's ratio, and density). Are they same to those of silicon crystal?
(some use the same properties but other say that those are different).
but I am not sure. Anyway, I need your knowlege.

Thanks.

 Yong Hwa Park
 Research Associate of Center for Aerospace Structures,
 Department of Aerospace Engineering Sciences,
 University of Colorado at Boulder,
 Boulder, CO 80309-0429,USA.
 Phone: 303-735-1316 (O)/303-786-1585(H)
 Fax: 303-492-4990
 Email: [email protected]


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