Hello all,
I need to make ohmic contacts to p-type silicon resistors. I am using aluminum
for this purpose but all the contacts that I have had so far have been showing
a diode behavior. I have evaporated aluminum at a pressure of about 10^-6 Torr
using a Tungsten boat, and then sintered the sample in oven (450C for 45min).
All the contacts show a forward bias voltage of around 2.5V and a reverse
breakdown voltage of around -8V. These numbers are not even close to Schotky
diode values. I did not expect formation of diodes, since aluminum itself is
a p-type dopant of silicon, and I should have a p+-p type of junction.
Does anybody know how to solve this problem? Any comments will be highly
appreciated.
Thank you in advance.
Regards,
Behraad Bahreyni
_____________________________________________________________________
Behraad Bahreyni
Material Research Laboratory, Department of ECE
The University of Manitoba
15 Gillson Street, Winnipeg, Manitoba, Canada R3T 5V6
Tel: +1-(204)-951 2027 Fax: +1-(204)-261 4639
email: [email protected] http://www.ee.umanitoba.ca/~bahreyni